Workpiece carrier with suction slot for a disk-shaped workpiece

Details Workpiece carrier with suction slot for a disk-shaped workpiece Workpiece carrier with suction slot for a disk-shaped workpiece

1991-05-02

1993-01-19

Rivell, John

Heat exchange

With retainer for removable article

269 21, 118725, 118728, F28F 700, C23C 1646, B25B 1100

Patent

active

051800004

ABSTRACT:
For the transmission of heat under vacuum conditions to a workpiece, a carrier is used with gas outlets and gas return openings distributed on its surface. A dynamic gas layer is thus formed between the carrier and the workpiece wherein the gas effects thermal conduction between the carrier and the workpiece. The gas outlets terminate in a distribution space implemented as a groove and has at least on slot shaped aperture extending substantially around most of the carrier periphery.

REFERENCES:
patent: 4139051 (1979-02-01), Jones et al.
patent: 4183545 (1980-01-01), Daly
patent: 4403567 (1983-09-01), Dacosta et al.
patent: 4448404 (1984-05-01), Ogawa et al.
patent: 4508161 (1985-04-01), Holden
patent: 4603466 (1986-08-01), Morley
patent: 4721462 (1988-01-01), Collins, Jr.
patent: 4909314 (1990-03-01), Lamont, Jr.
patent: 4949783 (1990-08-01), Lakios et al.
patent: 4955590 (1990-09-01), Narushima et al.
patent: 5033538 (1991-07-01), Wagner et al.

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