Workpiece carrier with suction slot for a disk-shaped workpiece

Heat exchange – With retainer for removable article

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Details

269 21, 118725, 118728, F28F 700, C23C 1646, B25B 1100

Patent

active

051800004

ABSTRACT:
For the transmission of heat under vacuum conditions to a workpiece, a carrier is used with gas outlets and gas return openings distributed on its surface. A dynamic gas layer is thus formed between the carrier and the workpiece wherein the gas effects thermal conduction between the carrier and the workpiece. The gas outlets terminate in a distribution space implemented as a groove and has at least on slot shaped aperture extending substantially around most of the carrier periphery.

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patent: 5033538 (1991-07-01), Wagner et al.

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