Workpiece carrier with monopiece pressure plate and low gimbal p

Details Workpiece carrier with monopiece pressure plate and low gimbal p Workpiece carrier with monopiece pressure plate and low gimbal p

1998-01-12

1999-11-23

Eley, Timothy V.

Abrading

Abrading process

Glass or stone abrading

451287, 451288, 451289, B24B 100

Patent

active

059891041

ABSTRACT:
A carrier for semiconductor wafers to be polished comprises a rigid upper housing, a rigid pressure plate and a gimbal mechanism connecting the plate and housing which permits the plate to gimbal or wobble relative to the housing. The pressure plate is a one-piece component and has a central cut-out portion in which the gimbal mechanism is disposed, thereby establishing a low gimbal point and reducing the incidence of tilting. The gimbal mechanism has an inner bearing ring which is fastened to the underside of the housing, and an outer bearing ring which is fastened to an outer portion of the pressure plate.

REFERENCES:
patent: 3747282 (1973-07-01), Katzke
patent: 3833230 (1974-09-01), Noll
patent: 4194324 (1980-03-01), Bonora et al.
patent: 4270314 (1981-06-01), Cesna
patent: 4625463 (1986-12-01), Sekiya
patent: 4811522 (1989-03-01), Gill, Jr.
patent: 4918870 (1990-04-01), Torbert et al.
patent: 5081795 (1992-01-01), Tanaka et al.
patent: 5205082 (1993-04-01), Shendon et al.
patent: 5226636 (1993-07-01), Nenadic et al.
patent: 5297361 (1994-03-01), Baldy et al.
patent: 5335457 (1994-08-01), Matsuda et al.
patent: 5377451 (1995-01-01), Leoni et al.
patent: 5398459 (1995-03-01), Okumura et al.
patent: 5423558 (1995-06-01), Koeth et al.
patent: 5476614 (1995-12-01), Hirose et al.
patent: 5522965 (1996-06-01), Chisholm et al.
patent: 5527209 (1996-06-01), Volodarsky et al.
patent: 5533924 (1996-07-01), Stroupe et al.
patent: 5554064 (1996-09-01), Breivogel et al.
patent: 5571044 (1996-11-01), Bolandi et al.
patent: 5584751 (1996-12-01), Kobayashi et al.
patent: 5624299 (1997-04-01), Shendon
patent: 5681215 (1997-10-01), Sherwood et al.
patent: 5716258 (1998-02-01), Metcalf

Affiliated with

Also associated with

Rating

Workpiece carrier with monopiece pressure plate and low gimbal p does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Workpiece carrier with monopiece pressure plate and low gimbal p, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Workpiece carrier with monopiece pressure plate and low gimbal p will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1215635