Work transporting robot and semiconductor device manufacturing a

Material or article handling – Horizontally swinging load support – Swinging about pivot

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901 15, 744701, 414217, B25J 1802

Patent

active

058578269

ABSTRACT:
A work transporting robot includes a first, second and third arms each of which is rotationally moved around a common axis by individual driving source within a plane, the plane being parallel to one another, a pair of first coupled arms each of which is rotatably connected its one end to a leading edge section of the second arm which is disposed intermediate position of the first and third arms, and a leading edge section of one of the first and third arms, a first work supporting table which is connected to the other end of the pair of first coupled arms, a pair of second coupled arms each of which is rotatably connected its one end to a leading edge section of the second arm which is disposed intermediate position of the first and third arms, and a leading edge section of the other of the first and third arms, and a second work supporting table which is connected to the other end of the pair of second coupled arms, and wherein the first and third arms are disposed in the same side to one another with respect to a plane which includes the axis and the second arm.

REFERENCES:
patent: 5647724 (1997-07-01), Davis, Jr.

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