Work piece transfer apparatus

Material or article handling – Horizontally swinging load support – Swinging about pivot

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Details

7449005, 414749, 901 12, B66C 2300

Patent

active

06007292&

ABSTRACT:
A work piece transfer system particularly suited for transferring semi-conductor wafers from one environment, through a loadlock, to another environment and back again employs a series of pivotally interconnected levers located within the loadlock when the device is in its central collapsed position. Only a single shaft extends through the loadlock, the main drive shaft for operating the device. The lever arm, which is attached to the input shaft for rotation with it, has a hole through its center for pivotally supporting a composite lever arm half of which is located above the first lever arm, and the other half of which is located below the lever arm, with the two portions connected by a pin passing through a hole in the center of the first lever arm. The work piece is pivotally attached to the opposite end of the first lever arm; and an interconnecting lever arm is pivotally attached between one end of the composite lever arm and an intermediate pivot on the work piece. The composite lever arm also has a primary pivot which is slidably located in a channel or groove aligned with the axis of the input drive shaft; so that as the drive shaft rotates, this pivot slides in the groove to different locations establishing the overall positioning of the work piece support member to one or the other of two sides of the central position located in the loadlock.

REFERENCES:
patent: 4483654 (1984-11-01), Koch et al.
patent: 4584045 (1986-04-01), Richards
patent: 4728522 (1988-03-01), Lada et al.
patent: 4801235 (1989-01-01), Rauschdorf
patent: 4955780 (1990-09-01), Shimane
patent: 5151008 (1992-09-01), Ishida
patent: 5333986 (1994-08-01), Mizukami

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