Abrading – Machine – Rotary tool
Reexamination Certificate
2006-11-28
2006-11-28
Nguyen, Dung Van (Department: 3723)
Abrading
Machine
Rotary tool
C451S398000, C451S286000
Reexamination Certificate
active
07140956
ABSTRACT:
An apparatus for planarizing a work piece includes an easily assembled work carrier. The carrier includes a carrier insert having a work piece bladder clamped to a carrier backing plate with a plurality of clamps to form a plurality of web plenums. The outer edge of the bladder is supported by a rib that is coupled to a carrier plenum. By adjusting the pressure in the carrier plenum, the pressure exerted on the edge of a work piece during a planarization operation can be adjusted. The carrier also includes a floating wear ring that surrounds the work piece bladder and a work piece mounted on that bladder. By adjusting the force exerted by the wear ring on a polishing pad, independently of the pressure exerted by the rib at the edge of the bladder, the material removal rate near the edge of the work piece can be controlled.
REFERENCES:
patent: 5205082 (1993-04-01), Shendon et al.
patent: 5230184 (1993-07-01), Bukhman
patent: 5584746 (1996-12-01), Tanaka et al.
patent: 5584751 (1996-12-01), Kobayashi et al.
patent: 5605488 (1997-02-01), Ohashi et al.
patent: 5624299 (1997-04-01), Shendon
patent: 5660517 (1997-08-01), Thompson et al.
patent: 5681215 (1997-10-01), Sherwood et al.
patent: 5738574 (1998-04-01), Tolles et al.
patent: 5762539 (1998-06-01), Nakashiba et al.
patent: 5762544 (1998-06-01), Zuniga et al.
patent: 5762546 (1998-06-01), James et al.
patent: 5795215 (1998-08-01), Guthrie et al.
patent: 5803799 (1998-09-01), Volodarsky et al.
patent: 5820448 (1998-10-01), Shamouilian et al.
patent: 5851140 (1998-12-01), Barns et al.
patent: 5916016 (1999-06-01), Bothra
patent: 5916488 (1999-06-01), Takuma et al.
patent: 5941758 (1999-08-01), Mack
patent: 5964653 (1999-10-01), Perlov et al.
patent: 5980361 (1999-11-01), Muller et al.
patent: 6056632 (2000-05-01), Mitchel et al.
patent: 6110026 (2000-08-01), Arai et al.
patent: 6159079 (2000-12-01), Zuniga et al.
patent: 6162116 (2000-12-01), Zuniga et al.
patent: 6210255 (2001-04-01), Zuniga et al.
patent: 6361419 (2002-03-01), Zuniga et al.
patent: 6390905 (2002-05-01), Korovin et al.
patent: 6558232 (2003-05-01), Kajiwara et al.
patent: 6663466 (2003-12-01), Chen et al.
patent: 6857945 (2005-02-01), Chen et al.
patent: 199 41 903 (2001-03-01), None
patent: 0 451 471 (1991-10-01), None
patent: 0 847 835 (1998-06-01), None
patent: 0 922 531 (1999-06-01), None
patent: WO 96/36459 (1996-11-01), None
patent: WO 00/51782 (2000-09-01), None
Farmer James L.
Herb John D.
Korovin Nikolay N.
Schultz Stephen C.
Ingrassia Fisher & Lorenz P.C.
Nguyen Dung Van
Speedfam-Ipec Corporation
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