Abrading – Abrading process – Utilizing nonrigid tool
Reexamination Certificate
2006-03-21
2006-03-21
Nguyen, Dung Van (Department: 3723)
Abrading
Abrading process
Utilizing nonrigid tool
C451S289000, C451S398000
Reexamination Certificate
active
07014541
ABSTRACT:
An apparatus for planarizing a work piece includes an easily assembled work carrier. The carrier includes a carrier insert having a work piece bladder clamped to a carrier backing plate with a plurality of clamps to form a plurality of web plenums. The outer edge of the bladder is supported by a rib that is coupled to a carrier plenum. By adjusting the pressure in the carrier plenum, the pressure exerted on the edge of a work piece during a planarization operation can be adjusted. The carrier also includes a floating wear ring that surrounds the work piece bladder and a work piece mounted on that bladder. By adjusting the force exerted by the wear ring on a polishing pad, independently of the pressure exerted by the rib at the edge of the bladder, the material removal rate near the edge of the work piece can be controlled.
REFERENCES:
patent: 5851140 (1998-12-01), Barns et al.
patent: 5964653 (1999-10-01), Perlov et al.
patent: 6162116 (2000-12-01), Zuniga et al.
patent: 6558232 (2003-05-01), Kajiwara et al.
patent: 6857945 (2005-02-01), Chen et al.
Farmer James L.
Herb John D.
Korovin Nikolay N.
Schultz Stephen C.
Ingrassia Fisher & Lorenz P.C.
Nguyen Dung Van
Speedfam-Ipec Corporation
LandOfFree
Work piece carrier with adjustable pressure zones and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Work piece carrier with adjustable pressure zones and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Work piece carrier with adjustable pressure zones and... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3574422