Work holder for masking

Details Work holder for masking Work holder for masking

1989-06-05

1990-05-01

Hoag, Willard

Coating apparatus

Work holders, or handling devices

Gripper or clamped work type

432253, B05C 102, B05C 309

Patent

active

049209159

ABSTRACT:
A work holder (12) for holding a workpiece (2) while partially masking the same by use of a mask (18). The workpiece and the mask are elastically pressed against each other by an aggregate (15) of heat-resistant fiber such as metal fiber or ceramic fiber, so that the workpiece and the mask are brought into close contact with each other. This work holder is adapted to form a resistor film (9) on a part of the surface of a chip (2) to form a chip-type resistor (1), for example, by a thin film forming method such as sputtering.

REFERENCES:
patent: 1735004 (1929-11-01), Hopkins et al.
patent: 3088435 (1963-05-01), Wolff
patent: 3276423 (1966-10-01), Triller
patent: 3897324 (1975-07-01), Delmonte
patent: 4457359 (1984-07-01), Holden
patent: 4678531 (1987-07-01), Metzger et al.
patent: 4715812 (1987-12-01), Matuscha

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