Work clamp and wire bonding apparatus

Metal fusion bonding – Including means to apply flux or filler to work or applicator – Gaseous flux

Reexamination Certificate

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Details

C228S044700, C228S904000

Reexamination Certificate

active

07975899

ABSTRACT:
A work clamp and a wire bonding apparatus that can sufficiently restrain oxidation of a bonding area even while reducing an amount of antioxidant gas that is used are provided. The work clamp includes an interior hollow portion10providing an atmosphere of the antioxidant gas, a lower opening portion11aprovided below the interior hollow portion, for containing the bonding area in the interior hollow portion, an upper opening portion11provided above the interior hollow portion, for exposing the bonding area, a cavity13covering the interior hollow portion and having an area larger than an opening area of the upper opening portion, gas introduction ports14a,14bprovided at the cavity, for introducing the antioxidant gas into the cavity, and holes21connected to below the cavity, for blowing the antioxidant gas introduced from the gas introduction port to a portion other than the bonding area of the work.

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