Material or article handling – Load carried along a horizontal linear path – Carried via magnetic floating
Reexamination Certificate
2007-03-20
2007-03-20
Underwood, Donald (Department: 3652)
Material or article handling
Load carried along a horizontal linear path
Carried via magnetic floating
C198S341050, C198S464200, C198S468400, C414S416060
Reexamination Certificate
active
10809683
ABSTRACT:
A work attracting apparatus and a work attracting method that uses a Bernoulli chuck or the like as a work attraction section and that can ensure the perfect operation of attracting and receiving. The work attraction section (Bernoulli plate1and Bernoulli arm2) attracts a wafer14being transported in; a movement section (moving unit3and speed variable actuator10) moves the work attraction section in a direction of transport of the wafer14; a work detector4detects the wafer14being transported at a predetermined position and outputs a detection signal; and a controller5, when receiving the detection signal, controls the movement section to move together with the wafer14being transported and makes the work attraction section operate.
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Oki Electric Industry Co. Ltd.
Rabin & Berdo PC
Underwood Donald
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