Active solid-state devices (e.g. – transistors – solid-state diode – Transmission line lead
Reexamination Certificate
2006-02-07
2006-02-07
Nguyen, Tuan H. (Department: 2813)
Active solid-state devices (e.g., transistors, solid-state diode
Transmission line lead
C257S760000, C257S758000
Reexamination Certificate
active
06995457
ABSTRACT:
A wiring structure including a transmission line structure capable of simplifying a manufacturing process is obtained. This wiring structure comprises a first trench formed on a first insulator film provided on a substrate, a first wire formed in the extensional direction of the first trench along at least part of the inner surface of the first trench and a second wire formed to be opposed to the first wire through a second insulator film for forming a transmission line for transmitting signals with the first wire. The first wire, the second insulator film and the second wire are embedded in the first trench. This wiring structure is manufactured through a single lithography step, a single etching step and a single resist removing step for forming the first trench and a single CMP step, whereby the manufacturing process is simplified.
REFERENCES:
patent: 5372967 (1994-12-01), Sundaram et al.
patent: 6727154 (2004-04-01), Gardner
patent: 2002/0102835 (2002-08-01), Stucchi et al.
patent: 09-260375 (1997-10-01), None
patent: P2000-13113 (2000-01-01), None
patent: P2002-50742 (2002-02-01), None
patent: P2002-158227 (2002-05-01), None
U.S. Appl. No. 60/230,729.
McDermott Will & Emery LLP
Nguyen Tuan H.
LandOfFree
Wiring structure and manufacturing method therefor,... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Wiring structure and manufacturing method therefor,..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wiring structure and manufacturing method therefor,... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3644961