Wiring pattern inspecting method and system for carrying out the

Image analysis – Applications – Manufacturing or product inspection

Patent

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Details

382141, 382258, 382298, G06K 900, G06K 942, G06K 932

Patent

active

059303824

ABSTRACT:
A wiring pattern inspecting method comprises irradiating a test object provided with wiring patterns formed in a plurality of layers with x-rays, obtaining a variable-density image signal corresponding to the thickness of the wiring patterns superposed in a plurality of layers including superposed sections of the wiring patterns, extracting a plurality of image signals, the number of which corresponding to that of the superposed wiring patterns, from the variable-density image signal, and comparing end point information or isolated point information about the wiring patterns obtained from image signal representing a larger number of superposed wiring patterns, and branch information about the end points or the isolated points on the wiring points, obtained from the extracted image signal representing a smaller number of superposed wiring patterns to inspect the wiring patterns for defects in the wiring patterns. The wiring pattern inspecting method is carried out by a wiring pattern inspecting system.

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patent: 5754621 (1998-05-01), Suzuki et al.

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