Wiring pattern detection method and apparatus

Details Wiring pattern detection method and apparatus Wiring pattern detection method and apparatus

1989-05-09

1991-04-30

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

With light attenuation

356237, 356398, G01B 1124, G01N 2100

Patent

active

050119605

ABSTRACT:
A method of detection of a wiring pattern using triangulation to detect a height thereof, comprising the steps of scanning a light beam from a light source, illuminating the wiring pattern to be detected by the scanned light beam, focusing the light reflected from the wiring pattern or a substrate, applying the focused light beam to a beam-splitter, and converting a wiring pattern configuration to a corresponding electric signal. Further, by blurring the focused light entering the beam-splitter, an expansion of a measurable height domain of the wiring pattern is possible. Furthermore, by applying a correction factor in response to the height of the substrate, the detected output of the wiring pattern height for a curved substrate can be sliced with a more appropriate slice level. Further, the beam-splitter comprises a reflection portion, a half reflection and half transmission portion, and a transmission portion. The width of the half reflection and half transmission portion is such that an upper and lower threshold value of the height of the wiring pattern can be determined, and thus the allowable limits of the wiring pattern height can be more accurately detected.

REFERENCES:
patent: 4349277 (1982-09-01), Mundy et al.
patent: 4472056 (1984-09-01), Nakagawa et al.
patent: 4650333 (1987-03-01), Crabb et al.
patent: 4674869 (1987-06-01), Pryor et al.
patent: 4796997 (1989-01-01), Svetkoff et al.
European Search Report, Appln. No. EP 89 30 4795, Berlin, Oct. 6, 1989, Examiner Vorropoulos, G.

Affiliated with

Also associated with

Rating

Wiring pattern detection method and apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wiring pattern detection method and apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wiring pattern detection method and apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-641440