Wireless signaling in a lithographic apparatus

Details Wireless signaling in a lithographic apparatus Wireless signaling in a lithographic apparatus

2007-03-13

2007-03-13

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C355S077000

Reexamination Certificate

active

10747615

ABSTRACT:
A lithographic apparatus capable of wirelessly communicating control and power signals, is presented herein. In one embodiment, the apparatus comprises an illumination system to provide a beam of radiation, a support structure configured to support a patterning device that imparts the beam of radiation with a pattern in its cross-section, a substrate holder configured to hold a substrate, a projection system to project the patterned beam radiation onto a target portion of the substrate, and a wireless signaling system configured to transmit and receive information-bearing electromagnetic radiation. The wireless system comprises at least a transmitter to transmit the electromagnetic radiation and a first transducer configured to receive and convert the electromagnetic radiation into a first electrical signal containing the information which is used to control at least a portion of the support structure, the substrate table, the projection system, and the illumination system.

REFERENCES:
patent: 2003/0164934 (2003-09-01), Nishi et al.
patent: 2003/0226951 (2003-12-01), Ye et al.

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