Wireless microelectromechanical systems (MEMS) pressure...

Details Wireless microelectromechanical systems (MEMS) pressure... Wireless microelectromechanical systems (MEMS) pressure...

2011-04-05

2011-04-05

Allen, Andre J (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

Reexamination Certificate

active

07918138

ABSTRACT:
A wireless microelectromechanical system (MEMS) pressure sensor with built in calibration. An actuator is coupled with a pressure sensing device to enable the pressure to be calibrated against the known pressure exerted by the actuator. The sensing component is configured to flex under the application of force to a pure bending condition, i.e., the sensing component flexes with no or insignificant shear forces in the sensing component.

REFERENCES:
patent: 7586239 (2009-09-01), Li et al.
patent: 2007/0000327 (2007-01-01), Sung et al.
patent: 2010/0158071 (2010-06-01), Cobianu et al.
Yeong Yau Loh, Fabrication Design of Micro Pressure Sensor With Built-in Automated Calibration, Master of Science Thesis, University of California—Riverside, Nov. 2006.
Jiang and Potter, Letter confirming Master's thesis was entered into the University catalog on Mar. 1, 2007.

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