Wireless MEMS capacitive sensor for physiologic parameter...

Surgery – Diagnostic testing – Detecting nuclear – electromagnetic – or ultrasonic radiation

Reexamination Certificate

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Reexamination Certificate

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06926670

ABSTRACT:
The present invention relates to an implantable microfabricated sensor device and system for measuring a physiologic parameter of interest within a patient. The implantable device is micro electromechanical system (MEMS) device and includes a substrate having an integrated inductor and at least one sensor formed thereon. A plurality of conductive paths electrically connect the integrated inductor with the sensor. Cooperatively, the integrated inductor, sensor and conductive paths defining an LC tank resonator.

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A Passive Wireless Integrated Humidity Sensor, Timothy Harpster et al. 2001, pp. 553-557.
Electrodeposited Copper Inductors for Intraocular pressure Telemetry; R. Puers et al.; 2001 pp. 124-129.
Hermetically Sealed Inductor-Capacitor (LC) Resonator for Remote Pressure Monitoring; Eun-Chul Park et al.; Sep. 8, 1998; pp. 7124-7128.
Micromachined Planar Inductors on Silicon Wafers for MEMS Applications; Chong H. Ahn et al.

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