Wire saw and method of slicing ingot by wire saw

Stone working – Sawing – Reciprocating

Patent

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Details

125 1601, 125 35, 125 28, B24D 300

Patent

active

058574549

ABSTRACT:
An ingot mounting block consists of an attachment block, a horizontal rocking block and a vertical rocking block. The horizontal rocking block is provided in such a manner to rock horizontally with regard to the attachment block. The vertical rocking block is provided in such a manner to rock vertically with regard to the attachment block. A semiconductor ingot is positioned at the top of the vertical rocking block and is secured thereto. During an alignment of a crystal orientation, the horizontal rocking block and the vertical rocking block are previously inclined at a predetermined angle with regard to the attachment block, and then they are attached to a work feed table of a wire saw.

REFERENCES:
patent: 5099820 (1992-03-01), Stricot
patent: 5201305 (1993-04-01), Takeuchi
patent: 5269285 (1993-12-01), Toyama et al.
patent: 5720271 (1998-02-01), Hauser

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