Metal fusion bonding – Process – Using high frequency vibratory energy
Patent
1990-05-14
1991-06-18
Heinrich, Sam
Metal fusion bonding
Process
Using high frequency vibratory energy
228179, H01L 21607
Patent
active
050243675
ABSTRACT:
A wire bonding method in which a bonding wire is pressed against bonding surfaces by a bonding tool so that bonding is performed by applying ultrasonic vibrations to the bonding tool which makes scrubbing actions to smoothen the bonding surfaces while the bonding is being performed.
REFERENCES:
patent: 3125803 (1964-03-01), Rich
patent: 3128649 (1964-04-01), Avila et al.
patent: 4140263 (1979-02-01), Diepeveen
patent: 4496095 (1985-01-01), Renshaw et al.
patent: 4614292 (1986-09-01), Polansky et al.
Terakado Yoshimitsu
Yamazaki Nobuto
Heinrich Sam
Kabushiki Kaisha Shinkawa
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