Metal fusion bonding – Means to apply vibratory solid-state bonding energy to work
Patent
1994-11-19
1996-03-26
Heinrich, Samuel M.
Metal fusion bonding
Means to apply vibratory solid-state bonding energy to work
228105, H01L 21607
Patent
active
055013880
ABSTRACT:
A bonding apparatus used in manufacturing, for example semiconductor devices, including an adiabatic plate provided beneath a bonding horn for blocking the radiant heat from a heating block that heats up a workpiece. The apparatus further includes horn cooling pipes and a mirror tube cooling pipe for blowing cooling air onto a bonding horn and onto a mirror tube of a detection camera or a detection camera supporting arm.
REFERENCES:
patent: 4877173 (1989-10-01), Fujimoto et al.
Heinrich Samuel M.
Kabushiki Kaisha Shinkawa
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