Wire bonding apparatus

Metal fusion bonding – Means to apply vibratory solid-state bonding energy to work

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Details

228105, H01L 21607

Patent

active

055013880

ABSTRACT:
A bonding apparatus used in manufacturing, for example semiconductor devices, including an adiabatic plate provided beneath a bonding horn for blocking the radiant heat from a heating block that heats up a workpiece. The apparatus further includes horn cooling pipes and a mirror tube cooling pipe for blowing cooling air onto a bonding horn and onto a mirror tube of a detection camera or a detection camera supporting arm.

REFERENCES:
patent: 4877173 (1989-10-01), Fujimoto et al.

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