Wire bonding apparatus

Metal fusion bonding – Means to apply vibratory solid-state bonding energy to work

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Details

228110, 228904, B23K 2010

Patent

active

051582236

ABSTRACT:
A wire bonding apparatus for connecting a chip electrode of a semiconductor chip and an inner lead of a lead frame through a bonding wire is described. The apparatus is provided with an X-Y table having a bonding head. An ultrasonic horn is attached rotatably to the bonding head, and extends in the Y direction. The ultrasonic horn has a capillary which holds the bonding wire. A Y table moving calculator which calculate a Y direction moving amount of the X-Y table, while taking a Z direction moving amount of the capillary into account, is provided. A signal from the Y table moving calculator is inputted to a Y table controller which controls Y direction movement of the X-Y table.

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