Window support member for a semiconductor processing system

Details Window support member for a semiconductor processing system Window support member for a semiconductor processing system

1998-10-21

2000-12-05

Graybill, David E.

Metal working

Barrier layer or semiconductor device making

118725, 219411, 392416, 392418, H01L 2100, H01L 2164, C23C 1600, F27D 1100, F26B 1900

Patent

active

061560790

ABSTRACT:
A semiconductor processing system includes a semiconductor processing chamber constructed of a main body, a window support member, and a window. The window support member is located over an opening into the main body. The window is located over the window support component. At least one radiation passage is formed in the window support component. The radiation passage has a first end which is open to the internal dimensions of the main body and a second end, opposing the first end, which terminates against the window.

REFERENCES:
patent: 5155336 (1992-10-01), Gronet et al.
patent: 5660472 (1997-08-01), Peuse et al.
patent: 5830277 (1998-11-01), Johnsgard et al.
patent: 5938850 (1999-08-01), Arami et al.
patent: 5986208 (1999-11-01), Taylor et al.
patent: 6054103 (2000-04-01), Collins et al.

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