Window portion with an adjusted rate of wear

Details Window portion with an adjusted rate of wear Window portion with an adjusted rate of wear

2005-03-01

2005-03-01

Wilson, Lee D. (Department: 3723)

Abrading

Abrading process

Glass or stone abrading

Reexamination Certificate

active

06860793

ABSTRACT:
A polishing pad includes a polishing layer, and the transparent window portion of the polishing layer having dispersed particles to increase the rate at which the window portion wears away during a polishing operation, and to avoid forming a lump in the polishing layer.

REFERENCES:
patent: 5413941 (1995-05-01), Koos et al.
patent: 5605760 (1997-02-01), Roberts
patent: 5893796 (1999-04-01), Birang et al.
patent: 5985679 (1999-11-01), Berman
patent: 6171181 (2001-01-01), Roberts et al.
patent: 6280290 (2001-08-01), Birang et al.
patent: 6354929 (2002-03-01), Adefris et al.
patent: 6428386 (2002-08-01), Bartlett
patent: 6454630 (2002-09-01), Tolles
patent: 6537133 (2003-03-01), Birang et al.
patent: 20030171081 (2003-09-01), Komukai et al.
patent: 0 829 328 (1998-03-01), None

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