Wien filter apparatus with hyperbolic surfaces

Details Wien filter apparatus with hyperbolic surfaces Wien filter apparatus with hyperbolic surfaces

1994-08-15

1995-08-22

Berman, Jack I.

Radiant energy

Electron energy analysis

250310, H01J 3726, H01J 4948

Patent

active

054442435

ABSTRACT:
A Wien filter is used with secondary electrons that are emitted from a primary electron beam scanning a sample surface in a scanning electron microscope (SEM) used as an energy analyzer or a spin rotater with charged particle beams. The beam is focussed into an interior area of the filter that has magnetic and electric fields generated to cross one another. The beam intersects the crossed fields perpendicularly. The faces of either the magnetic pole pieces or the electrodes have a shape approximating the shape of a portion of a hyperbola, while the other of the faces are substantially planar. Auxiliary electrodes extend parallel to the beam's path of travel between the electrodes. The filter provides a wide area that enables stigmatic focussing of a wide diameter beam.

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Journal of Applied Physics, vol. 43, No. 5, May 1972, "EXB Mass-Separator Design", R. L. Seliger, pp. 2352-2357.
Nuclear Instruments and Methods in Physics Research, A298 (1990), "Numerical analysis of trajectories and aberrations of a Wien filter including the effect of fringing fields", pp. 296-320.
Physical Review B, vol. 18, No. 5, 1 Sep. 1978, "Electron field emissions from ferromagnetic europium sulfide on tungsten", Kisker et al, pp. 2256-2275.

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