Wideband optical coupling into thin SOI CMOS photonic...

Optical waveguides – Planar optical waveguide – Thin film optical waveguide

Reexamination Certificate

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C385S129000, C385S130000, C385S014000, C385S033000, C385S052000, C385S049000

Reexamination Certificate

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07415184

ABSTRACT:
An arrangement for providing optical coupling into and out of a relatively thin silicon waveguide formed in the SOI layer of an SOI structure includes a lensing element and a defined reference surface within the SOI structure for providing optical coupling in an efficient manner. The input to the waveguide may come from an optical fiber or an optical transmitting device (laser). A similar coupling arrangement may be used between a thin silicon waveguide and an output fiber (either single mode fiber or multimode fiber).

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