Wide spectral range hybrid image detector

Details Wide spectral range hybrid image detector Wide spectral range hybrid image detector

2009-01-30

2011-11-15

Hannaher, Constantine (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

Reexamination Certificate

active

08058615

ABSTRACT:
An apparatus for detecting radiation of a plurality of wavelengths of the electromagnetic spectrum may be provided. The apparatus includes a substrate, a laser irradiated layer proximal to a first side of the substrate, and a microbolometer and at least one readout circuit proximal to a second side of the substrate in electrical communication with the laser irradiated layer. The substrate, laser irradiated layer, and the microbolometer are disposed and arranged such that radiation of a first wavelength is substantially detected by the laser irradiated layer, and radiation of a second wavelength is substantially detected by the microbolometer.

REFERENCES:
patent: 4201450 (1980-05-01), Trapani
patent: 4242149 (1980-12-01), King et al.
patent: 4277793 (1981-07-01), Webb
patent: 4965784 (1990-10-01), Land et al.
patent: 5234790 (1993-08-01), Lang et al.
patent: 5346850 (1994-09-01), Kaschmitter et al.
patent: 5640013 (1997-06-01), Ishikawa et al.
patent: 5773820 (1998-06-01), Osajda et al.
patent: 5977603 (1999-11-01), Ishikawa
patent: 6080988 (2000-06-01), Ishizuya et al.
patent: 6097031 (2000-08-01), Cole
patent: 6420706 (2002-07-01), Lurie et al.
patent: 6465860 (2002-10-01), Shigenaka et al.
patent: 6475839 (2002-11-01), Zhang et al.
patent: 6683326 (2004-01-01), Iguchi et al.
patent: 6790701 (2004-09-01), Shigenaka et al.
patent: 6800541 (2004-10-01), Okumura
patent: 6825057 (2004-11-01), Heyers et al.
patent: 6927432 (2005-08-01), Holm et al.
patent: 6984816 (2006-01-01), Holm et al.
patent: 7057256 (2006-06-01), Carey, III et al.
patent: 7256102 (2007-08-01), Nakata et al.
patent: 7354792 (2008-04-01), Carey, III et al.
patent: 7390689 (2008-06-01), Mazur et al.
patent: 7442629 (2008-10-01), Mazur et al.
patent: 7629582 (2009-12-01), Hoffman et al.
patent: 2002/0056845 (2002-05-01), Iguchi et al.
patent: 2002/0148964 (2002-10-01), Dausch et al.
patent: 2003/0029495 (2003-02-01), Mazur et al.
patent: 2006/0006482 (2006-01-01), Rieve et al.
patent: 2006/0132633 (2006-06-01), Nam et al.
patent: 2006/0145148 (2006-07-01), Hirai et al.
patent: 2006/0145176 (2006-07-01), Lee
patent: 2006/0181627 (2006-08-01), Farrier
patent: 2006/0231914 (2006-10-01), Carey, III et al.
patent: 2006/0244090 (2006-11-01), Roy et al.
patent: 2007/0178672 (2007-08-01), Tanaka et al.
patent: 2008/0258604 (2008-10-01), Mazur et al.
patent: 0566156 (1993-10-01), None
patent: 1794804 (2007-06-01), None
patent: 2030766 (1980-04-01), None
patent: 57173966 (1982-10-01), None
patent: 04318970 (1992-11-01), None
patent: 2003163360 (2003-06-01), None
patent: 2007-180643 (2007-07-01), None
patent: WO 2006086014 (2006-08-01), None
patent: 2008091242 (2008-07-01), None
Li, “Design and Simulation of an Uncooled Double-Cantilever Microbolometer with the Potential for ˜mK NETD,” 2004, Sensors and Actuators A, 351-359, vol. 112, Elsevier B.V.
Moloney, A. M., et al, “Novel Black Silicon PIN Photodiodes,” Semiconductor Photodetectors III, Proceedings of the SPIE, 2006, vol. 6119, 61190B-1-61190B-8, Bellingham, Washington.
Oden, P.I. et al, “Optical and Infrared Detection Using Microcantilevers,” Infrared Technology and Applications XXII, Proceedings of the SPIE, 1996, vol. 2744, 345-254, Orlando, Florida.
Wu, et al, “Near-Unity Below-Band-Gap Absorption by Microstructured Silicon,” 2001, Applied Physics Letters, 1850-1852, vol. 78, No. 13, American Institute of Physics.
Xu, Y., et al, “Infrared Detection Using Thermally Isolated Diode,” Sensors and Actuators A, Elsevier Sequoia S.A., 1993, vol. 36, 209-217, Lausanne, Switzerland.
Chien et al, “Pulse Width Effect in Ultrafast Laser Processing of Materials,” Applied Physics A, 2005, 1257-1263, 81, Springer Berlin, Heidelberg, Germany.
Nayak et al, “Semiconductor Laesr Crystallization of a-Si:H,” SPIE Digital Library, 2003, 277-380, vol. 4977, Bellingham, Washington.
Nayak et al, “Semiconductor Laser Crystallization of a-Si:H on Conducting Tin-Oxide-Coated Glass for Solar Cell and Display Applications,” Applied Physics A, 2005, 1077-1080, 80, Springer Berlin, Heidelberg, Germany.
Nayak et al, “Ultrafast-Laser-Assisted Chemical Restructuring of Silicon and Germanium Surfaces,” Applied Surface Science, 2007, 6580-6583, vol. 253, Issue 15, Elsevier B.V.
Nayak et al, “Ultrafast Laser Textured Silicon Solar Cells,” Mater. Res. Soc. Symp. Proc., 2009, vol. 1123, Materials Research Society.
Zhang et al, “Ultra-Shallow P+-Junction Formation in Silicon by Excimer Laser Doping: a Heat and Mass Transfer Perspective,” Int. J. Heat Mass Transfer, 1996, 3835-3844, vol. 39, No. 18, Elsevier Science Ltd., Great Britain.
Bogue, “From Bolometers to Beetles: The Development of Thermal Imaging Sensors,” Sensor Review (2007), vol. 27, No. 4, 278-281, Emerald Group Publishing Limited, Bingley, United Kingdom.
Carey, et al., “Fabrication of Micrometer-Sized Conical Field Emitters Using Femtosecond Laser-Assisted Etching of Silicon,” Proc. IVMC 2001, 75-76, UC Davis, Davis, CA.
Carey, et al., “Field Emission from Silicon. Microstructures Formed by Femtosecond Laser Assisted Etching,” Proc. CLEO 2001 (Baltimore, MD 2001) 555-557.
Carey, et al. “Femtosecond Laser-Assisted Microstructuring of Silicon for Novel Detector, Sensing and Display Technologies”, LEOS 2002, 97-98, Glasgow, Scotland.
Carey, et al., “High Sensitivity Silicon-Based VIS/NIR Photodetectors”, Optical Society of America (2003) 1-2.
Carey, et al. “Femtosecond Laser-Assisted Microstructuring of Silicon for Novel Detector, Sensing and Display Technologies”, LEOS 2003, 481-482, Tuscon, AR.
Carey et al., “Femtosecond-Laser-Assisted Microstructuring of Silicon Surfaces”, Optics and Photonics News, 2003. 14, 32-36.
Crouch et al., “Infrared Absorption by Sulfur-Doped Silicon Formed by Femtosecond Laser Irradiation”, Appl. Phys. A, 2004, 79, 1635-1641.
Crouch et al., “Comparison of Structure and Properties of Femtosecond and Nanosecond Laser-Structured Silicon” Appl. Phys. Lett., 2004, 84,1850-1852.
Dolgaev et al., “Formation of Conical Microstructures Upon Laser Evaporation of Solids”, Appl. Phys. A, 2001, 73, 177-181.
Fowlkes et al., “Surface Microstructuring and Long-Range Ordering of Silicon Nanoparticles”, Appl. Phys. Lett., 2002, 80 (20), 3799-3801.
Her et al., “Novel Conical Microstructures Created in Silicon With Femtosecond Laser Pulses”, CLEO 1998, 511-512, San Francisco, CA.
Her et al., “Microstructuring of Silicon with Femtosecond Laser Pulses,” Applied Physics Letters, 1998, 1673-1675, vol. 73, No. 12, American Institute of Physics.
Her, et al., “Femtosecond laser-induced formation of spikes on silicon,” Applied Physics A, 2000, 70, 383-385.
Hu et al., “Solar Cells from Basic to Advanced Systems,” McGraw Hill Book Co., 1983, 39, New York, New York.
Pedraza et al., “Surface Nanostructuring of Silicon”, Appl. Phys. A, 2003, 77, 277-284.
Pedraza et al., “Silicon Microcolumn Arrays Grown by Nanosecond Pulsed-Excimer Laser Irradiation”, Appl. Phys. Lett., 1999, 74 (16), 2322-2324, American Institute of Physics.
Sanchez et al., “Dynamics of the Hydrodynamical Growth of Columns on Silicon Exposed to ArF Excimer-Laser Irradiation”, Appl. Phys. A, 1998, 66, 83-86.
Sanchez et al., “Whiskerlike Structure Growth on Silicon Exposed to ArF Excimer Laser Irradiation”, Appl. Phys. Lett., 1996, 69 (5), 620-622.
Serpenguzel et al., “Temperature Dependence of Photluminescence in Non-Crystalline Silicon”, Photonics West (San Jose, CA, 2004) 454-462.
Shen et al., “Formation of Regular Arrays of Silicon Micorspikes by Femotsecond Laser Irradiation Through A Mask”, Appl. Phys. Lett., 82, 1715-1717 (2003).
Solar Energy Research Institute, “Basic Photovoltaic Principles and Methods,” Van Nos

Affiliated with

Also associated with

Rating

Wide spectral range hybrid image detector does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wide spectral range hybrid image detector, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wide spectral range hybrid image detector will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4312808