Wide range pressure control using turbo pump

Details Wide range pressure control using turbo pump Wide range pressure control using turbo pump

2005-10-07

2008-10-21

Kramer, Devon (Department: 3746)

Pumps

Condition responsive control of pump drive motor

With condition responsive control of pump fluid valve

C417S423400, C417S423100

Reexamination Certificate

active

07438534

ABSTRACT:
The present invention is an apparatus and method for controlling a process flow rate and a pressure in a vacuum process chamber that is evacuated by a turbomolecular pump. A throttle valve between the pump and the process chamber is controlled to regulate the pressure and flow rate. A backing valve downstream of the pump is also controlled to maintain the setting of the throttle valve within a preferred, stable operating range.

REFERENCES:
patent: 5443368 (1995-08-01), Weeks et al.
patent: 6200107 (2001-03-01), Brewster
patent: 6598615 (2003-07-01), Holland et al.
patent: 6869880 (2005-03-01), Krishnaraj et al.
patent: 7140847 (2006-11-01), Boger et al.
patent: 2001/0032613 (2001-10-01), Arai et al.
PCT Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration of International Application No. PCT/US06/38448; Date of mailing: Nov. 26, 2007.
PCT International Search Report of International Application No. PCT/US06/38448; Date of mailing of the International Search Report: Nov. 26, 2007.
PCT Written Opinion of the International Searching Authority of International Application No. PCT/US06/38448; Date of mailing: Nov. 26, 2007.

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