Measuring and testing – Fluid pressure gauge – Combined
Reexamination Certificate
2007-04-24
2007-04-24
Cygan, Michael (Department: 2855)
Measuring and testing
Fluid pressure gauge
Combined
C073S023270, C073S023290, C073S031040
Reexamination Certificate
active
11150868
ABSTRACT:
A combination vacuum gauge provides simultaneous absolute and differential pressure measurements over a wide range of pressures ranging from atmospheric pressures to ultrahigh vacuum by processing the readings from an absolute high vacuum gauge (e.g., an ionization gauge and/or a heat-loss sensor), a differential low vacuum gauge providing a differential relative to ambient pressure (e.g., a diaphragm sensor), and a barometric absolute pressure sensor exposed to the ambient atmosphere outside the measurement region. The barometric absolute pressure sensor reading is used to convert the differential vacuum gauge reading from uncalibrated differential pressure to calibrated absolute pressure.
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Installation Guide: Setra Systems Model 264 Differential Pressure Transducer, Setra, 159 Swanson Road, Boxborough, MA 01719.
MKS Releases New Pressure/Vacuum Transducer, MKS Instruments, downloaded from http://www.mksinst.com/PRhps901.html, Mar. 22, 2005.
Borenstein Michael D.
Rutt Paul M.
Allen Andre
Brooks Automation Inc.
Cygan Michael
Hamilton Brook Smith & Reynolds P.C.
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