Wide field calibration of a multi-sensor array

Details Wide field calibration of a multi-sensor array Wide field calibration of a multi-sensor array

1998-04-10

2000-09-26

Assouad, Patrick

Data processing: measuring, calibrating, or testing

Calibration or correction system

378207, 2502521, H01L 2100

Patent

active

061253359

ABSTRACT:
A method has been developed to calibrate the relative radiation response of sensors in an array by substitutional analysis of the sensor outputs caused by a radiation field wider than the array. The array is positioned in the wide field in such a way that the sensor positions in the array are exchanged once by translation in order to calculate ratios of neighboring detector sensitivity and once by rotation in order to calculate ratios of mirror detector sensitivities. There is no dependence on dose reproducibility, field flatness or symmetry. The method requires that the profile shape produced by the machine during each measurement be reproducible and that the array movements do not affect the scattering conditions.

REFERENCES:
patent: 5027818 (1991-07-01), Bova et al.
patent: 5256879 (1993-10-01), McNulty et al.
patent: 5302824 (1994-04-01), Prager
patent: 5430785 (1995-07-01), Pfoh et al.
patent: 5473663 (1995-12-01), Hsieh
patent: 5506880 (1996-04-01), Scardino et al.
patent: 5511549 (1996-04-01), Legg et al.
patent: 5604347 (1997-02-01), Petrick et al.
patent: 5621214 (1997-04-01), Sofield
patent: 5627367 (1997-05-01), Sofield
patent: 5771272 (1998-06-01), Berger et al.
patent: 5789622 (1998-08-01), Quon et al.
patent: 5866900 (1999-02-01), Jacobson et al.
patent: 6008494 (1999-12-01), Heukenfeldt Jansen

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