Wet processing apparatus with movable partitioning plate between

Details Wet processing apparatus with movable partitioning plate between Wet processing apparatus with movable partitioning plate between

1997-09-26

1999-07-20

Powell, William

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

438745, H01L 2100

Patent

active

059252138

ABSTRACT:
In a wet processing apparatus including a first processing chamber for carrying out a first process with first chemicals and a second processing chamber for carrying out a second process with second chemicals, a separation cell is provided between the first and second processing chambers and receives pure water therein. Also, a movable partitioning plate is provided between the first and second processing chambers, to partition the first processing chamber from the second processing chamber. A lower end of the movable partitioning plate is immersed below a surface of pure water of the separation cell.

REFERENCES:
patent: 4957583 (1990-09-01), Buck
patent: 5022949 (1991-06-01), Jengo

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