Wet-processing apparatus and method of fabricating display...

Details Wet-processing apparatus and method of fabricating display... Wet-processing apparatus and method of fabricating display...

2011-06-14

2011-06-14

Norton, Nadine G (Department: 1713)

Etching a substrate: processes

Forming or treating electrical conductor article

C156S345180, C156S345100, C156S345110, C156S345150

Reexamination Certificate

active

07959816

ABSTRACT:
The wet-processing apparatus includes a wet-step bath in which a wet-step is carried out, and a vibration-type film separator for separating impurities out of a solution used in the wet-step. The wet-processing apparatus further includes a re-supply path through which the solution out of which the impurities were removed by means of the vibration-type film separator is re-supplied to the wet-step bath. Thus, it is possible to reuse a solution and a material of which a pattern is composed. Since the vibration-type film separator is used, it is possible to reduce a frequency of exchanging filters equipped in the vibration-type film separator, and ensure a high rate at which a material of which a pattern is composed is recovered, regardless of a specific gravity of the material.

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Japanese Office Action 2007-518946 Mar. 26, 2010 with partial translation.

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