Wear-through detector for multilayered parts and methods of usin

Details Wear-through detector for multilayered parts and methods of usin Wear-through detector for multilayered parts and methods of usin

1998-01-09

1999-09-07

Utech, Benjamin

Signals and indicators

Indicators

Element wear type

73 86, 250396R, 2504922, 25049221, G01B 1500, G01B 2108, G21K 504, G21K 508

Patent

active

059470534

ABSTRACT:
The present invention relates to wear-through detection in multilayered parts. This invention specifically encompasses, in one aspect, wear-through detection in semiconductor vacuum processing systems in which a wear indicator that will release a detectable constituent upon exposure to processing conditions is used inside the semiconductor vacuum processing tool. This invention permits real time detection of wear during operation of semiconductor vacuum processing equipment.

REFERENCES:
patent: 4982767 (1991-01-01), Pezzoli et al.
patent: 5126575 (1992-06-01), White
patent: 5134301 (1992-07-01), Kamata et al.
patent: 5146098 (1992-09-01), Stack
patent: 5187542 (1993-02-01), Madzsar
patent: 5262652 (1993-11-01), Bright et al.
patent: 5335373 (1994-08-01), Dangman et al.
patent: 5357636 (1994-10-01), Dresdner, Jr. et al.
patent: 5396076 (1995-03-01), Kimura
patent: 5517077 (1996-05-01), Bright et al.
patent: 5554852 (1996-09-01), Bright et al.
patent: 5559337 (1996-09-01), Ito et al.
patent: 5625185 (1997-04-01), Laser
patent: 5629528 (1997-05-01), Jost et al.
patent: 5640020 (1997-06-01), Murakoshi et al.

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