Wavelength variation measuring apparatus

Details Wavelength variation measuring apparatus Wavelength variation measuring apparatus

1995-05-08

1996-02-20

Housel, James C.

Optics: measuring and testing

By particle light scattering

With photocell detection

356351, 356358, G01B 902

Patent

active

054933951

ABSTRACT:
A wavelength variation measuring apparatus is disclosed. A light beam from a light source device capable of controlling an oscillation wavelength is divided into two light beams by a light divider. A predetermined optical path length difference is imparted to the divided light beams to synthesize the beams by a light synthesizer. A part of the synthesized light is used as detection light and the rest of the synthesized light is used as measuring light. A beat signal is detected from the detection light by a photodetector. A feedback control is effected to the light source device by use of the beat signal to thereby stabilize the oscillated wavelength of the light source device and to direct the measuring light to an object to be measured. The beat signal is rendered as a measurement data correction signal, and measurement data obtained by directing the measuring light to the object to be measured is corrected.

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patent: 5106191 (1992-04-01), Ohtsuka
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