Optical: systems and elements – Light interference – Electrically or mechanically variable
Reexamination Certificate
2007-03-13
2007-03-13
Assaf, Fayez G. (Department: 2872)
Optical: systems and elements
Light interference
Electrically or mechanically variable
C359S587000, C359S589000
Reexamination Certificate
active
10861229
ABSTRACT:
A wavelength-tunable optical filter includes a stationary mirror, a movable mirror disposed so as to face the stationary mirror, an actuating plate for actuating the movable mirror, and a peripheral supporting portion holding the actuating plate which are disposed above a base layer. The movable mirror is displaced by applying a voltage between the electrodes provided on the actuating plate and the base layer, and the actuating plate is disposed between the movable mirror and the peripheral supporting portion so as to be displaced due to an electrostatic force.
REFERENCES:
patent: 6341039 (2002-01-01), Flanders et al.
patent: 2002/0048301 (2002-04-01), Wang et al.
patent: 2002-023070 (2002-01-01), None
patent: 2002-243937 (2002-08-01), None
patent: 2003-177336 (2003-06-01), None
patent: 2003-185941 (2003-07-01), None
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