Wavelength-tunable optical filter

Optical: systems and elements – Light interference – Electrically or mechanically variable

Reexamination Certificate

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Details

C359S587000, C359S589000

Reexamination Certificate

active

10861229

ABSTRACT:
A wavelength-tunable optical filter includes a stationary mirror, a movable mirror disposed so as to face the stationary mirror, an actuating plate for actuating the movable mirror, and a peripheral supporting portion holding the actuating plate which are disposed above a base layer. The movable mirror is displaced by applying a voltage between the electrodes provided on the actuating plate and the base layer, and the actuating plate is disposed between the movable mirror and the peripheral supporting portion so as to be displaced due to an electrostatic force.

REFERENCES:
patent: 6341039 (2002-01-01), Flanders et al.
patent: 2002/0048301 (2002-04-01), Wang et al.
patent: 2002-023070 (2002-01-01), None
patent: 2002-243937 (2002-08-01), None
patent: 2003-177336 (2003-06-01), None
patent: 2003-185941 (2003-07-01), None

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