Wavelength stabilizer for narrow bandwidth laser

Coherent light generators – Particular beam control device – Having particular beam control circuit component

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372 28, 372 30, 372 32, 372 57, H01S 313

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052436144

ABSTRACT:
A wavelength monitor/stabilizer for narrowly controlling the bandwidth of laser; the monitor/stabilizer uses parameters Q, F or G derived by measuring diameters of interference fringes given by the beam of the wavelength-controlled narrow bandwidth laser e.g. excimer laser and those given by the reference light e.g. of a mercury lamp. The controlling is made by controlling the parameter to be in a predetermined range. An image sensing unit for detecting the interference fringes are splitted into plural image sensors with adjustable distance for enabling more rapid measurement by skipping the in-between part.

REFERENCES:
patent: 4947398 (1990-08-01), Yasuda et al.
patent: 4977563 (1990-12-01), Nakatani et al.
patent: 5087884 (1992-12-01), Terada
patent: 5107511 (1992-04-01), Nakatani et al.
patent: 5142543 (1992-08-01), Wakabayasta et al.
J. Opt. Soc. Am. B., vol. 5, No. 8, pp. 1576-1587, Aug. 1988, Ch. Salomon, et al., "Laser Stabilization at the Millihertz Level".
Wavelength Stabilization System for a Pulsed or CW Laser by T. Henderson and H. Rieger (Optics and Laser Technology, Aug. 1986, pp. 187-189).

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