X-ray or gamma ray systems or devices – Specific application – Diffraction – reflection – or scattering analysis
Patent
1999-01-25
1999-07-20
Porta, David P.
X-ray or gamma ray systems or devices
Specific application
Diffraction, reflection, or scattering analysis
378 85, 378145, G21K 102
Patent
active
059265221
ABSTRACT:
An x-ray collimator for wavelength dispersive spectroscopy and the like includes a grazing incidence mirror optic having a polycapillary x-ray optic nested therein. The polycapillary x-ray optic is mounted in a hollow bore of the grazing incidence mirror optic so as not to interfere with operation of the grazing incidence mirror. The polycapillary x-ray optic extends the range of the grazing incidence mirror optic to higher energy ranges. The x-ray collimator of the present invention may be employed in a wavelength dispersive x-ray spectrometer including a diffracting element positioned to receive x-rays collimated by the x-ray collimator, and an x-ray detector positioned to receive the x-rays defracted by the diffracting element. A wavelength dispersive x-ray spectrometer in accordance with the present invention may be used in combination with an energy beam microscope, such as an electron microscope, to analyze x-rays emanating from a sample specimen.
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Howard James V.
McCarthy Jon J.
Noran Instruments, Inc.
Porta David P.
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