Coherent light generators – Particular beam control device – Nonlinear device
Reexamination Certificate
2008-03-04
2008-03-04
Nguyen, Dung (Department: 2828)
Coherent light generators
Particular beam control device
Nonlinear device
C372S021000
Reexamination Certificate
active
11500031
ABSTRACT:
A fifth harmonic wave is formed from a fundamental wave of P polarization via a second harmonic wave forming optical element3, a third harmonic wave forming optical element4, and a fifth harmonic wave forming optical element6, and a second harmonic wave of P polarization is formed from a fundamental wave of P polarization via a second harmonic wave forming optical element9. A fundamental wave of S polarization is combined with the second harmonic wave of P polarization described above by a dichroic mirror13; furthermore, the fifth harmonic wave of P polarization, the fundamental wave of S polarization described above and the second harmonic wave of P polarization are combined by a dichroic mirror10, and are incident on a seventh harmonic wave forming optical element11. A seventh harmonic wave of S polarization is formed from the fifth harmonic wave and second harmonic wave of P polarization, and is combined with the fundamental wave of S polarization by being incident on an eighth harmonic wave forming optical element12, so that an eighth harmonic wave of P polarization is formed.
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Oshita Yoshinori
Tokuhisa Akira
Frishauf Holtz Goodman & Chick P.C.
Nguyen Dung
Nikon Corporation
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