Waveguiding structures with embedded microchannels and...

Optical waveguides – Planar optical waveguide – Thin film optical waveguide

Reexamination Certificate

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C385S129000, C438S027000, C438S029000, C438S031000, C438S065000, C438S069000

Reexamination Certificate

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07471866

ABSTRACT:
The invention provides a method for fabricating planar waveguiding structures with embedded microchannels. The method includes the step of depositing, over a planar template having at least one indented feature comprising a ridge of a first optical material and a narrow trench adjacent thereto, a second optical material, and the step of subsequent annealing thereof, so that an embedded hollow microchannel forms within the trench. The method provides planar structures wherein the ridge and the embedded microchannel cooperate to form an optical waveguiding structure having a waveguiding direction collinear with the embedded microchannel. Embodiments of the method for forming microfluidic devices integrating ridge waveguides with hollow microchannels having surface access points for fluid delivery, and for forming photonic crystals, are disclosed together with corresponding device embodiments.

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“A prealigned process of integrating optical waveguides with microfluidic devices”, Lien et al, IEEE Phot. Tech. Let. vol. 16, No. 6, 2004.
“Silica-on-Silicon Optical Sensor Based on Integrated Waveguides and Microchannels”, Phot. Tech. Lett. No. 17(2), pp. 441-443, 2005.
“Microchannels for the Integration of Liquid Media in Silica Waveguide Structures” Technical Digest of Int. Photonics Research and Applications, Paper IMD3, San Diego, CA Apr. 11-13, 2005.
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