Waveguides in integrated circuits

Details Waveguides in integrated circuits Waveguides in integrated circuits

2006-07-14

2009-11-03

Barnie, Rexford N (Department: 2819)

Wave transmission lines and networks

Long lines

Waveguide type

C333S236000, C333S240000, C333S241000, C333S242000, C333S245000, C333S248000, C333S257000

Reexamination Certificate

active

07612638

ABSTRACT:
A waveguide in semiconductor integrated circuit is disclosed, the waveguide comprises a horizontal first metal plate, a horizontal second metal plate above the first metal plate, separated by an insulation material, and a plurality of metal vias positioned in two parallel lines, running vertically through the insulation material in contacts with both the first and second metal plates, wherein the first and second metal plates and the plurality of metal vias form a metal enclosure in a cross-sectional view that can serve as a waveguide.

REFERENCES:
patent: 5107231 (1992-04-01), Knox
patent: 5982256 (1999-11-01), Uchimura et al.
patent: 20A20090403 (2009-02-01), None

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