Waveguide type semiconductor photodetecting device and fabricati

Details Waveguide type semiconductor photodetecting device and fabricati Waveguide type semiconductor photodetecting device and fabricati

1996-11-27

1997-12-23

Ngo, John

Optical waveguides

Planar optical waveguide

Thin film optical waveguide

385132, 385 14, 385 43, 257432, G02B 610

Patent

active

057013799

ABSTRACT:
A waveguide type semiconductor photodetecting device has a semiconductor substrate, a photodetecting element, and a waveguide optically coupled with the photodetecting element which can avoid occurrence of light loss in the tapered waveguide even when a width of a light inciding side of the tapered waveguide is widened. The waveguide has a waveguide layer gradually narrowing a width and gradually increasing a layer thickness and a refraction index from light incident side to the photodetecting element. The waveguide is integrated with the photodetecting element on the semiconductor substrate.

REFERENCES:
patent: 5121182 (1992-06-01), Kuroda et al.
patent: 5134671 (1992-07-01), Koren et al.
patent: 5323476 (1994-06-01), Mueller et al.
patent: 5521945 (1996-05-01), Takeuchi et al.
K. Kato et al., "Design of Ultrawide-Band, High-Sensitivity p-i-n Protodetectors", IEICE Trans. Electron., vol. E76-C, No. 2, Feb. 1993, pp. 214-221.

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