Waveguide type photodetector and a method of fabricating the sam

Details Waveguide type photodetector and a method of fabricating the sam Waveguide type photodetector and a method of fabricating the sam

1992-05-26

1994-02-08

Lee, John D.

Optical waveguides

Planar optical waveguide

Thin film optical waveguide

372 48, 385 24, 385 2, 257195, 257436, 257466, G02B 610

Patent

active

052855147

ABSTRACT:
In a waveguide type photodetector for receiving and detecting a light guided thereinto, a groove is formed in a semiconductor substrate, a waveguide layer is formed on the semiconductor substrate, and a light absorbing layer for absorbing a light propagated through a waveguide in the waveguide layer is formed on the waveguide layer. The waveguide is formed as a three-dimensional waveguide formed in the waveguide layer due to the presense of the groove. The three-dimensional waveguide is maintained also under the light absorbing layer since the refractive index of a portion layered on the groove formed in the substrate is made large than that of portions other than this portion layered above the groove.

REFERENCES:
patent: 4553317 (1985-11-01), Sakaki et al.
patent: 4794609 (1988-12-01), Hara et al.
patent: 4926431 (1990-05-01), Kawanishi et al.
patent: 4951290 (1990-08-01), Morimoto et al.
patent: 5109444 (1992-04-01), Handa et al.

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