Waveguide type optical integrated circuit element and method for

Details Waveguide type optical integrated circuit element and method for Waveguide type optical integrated circuit element and method for

1998-06-17

2000-12-19

Schuberg, Darren

Optical waveguides

Integrated optical circuit

385 50, 385132, 372 50, G02B 612

Patent

active

061636312

ABSTRACT:
The waveguide type optical integrated circuit element of this invention includes: a semiconductor laser of an end face output type; and an optical waveguide for propagating output light from the semiconductor laser, the optical waveguide including a plurality of semiconductor layers, the semiconductor laser and the optical waveguide being integrally formed side by side on a semiconductor substrate, wherein a single semiconductor layer is buried in an interface area between the semiconductor laser and the optical waveguide.

REFERENCES:
patent: 4601535 (1986-07-01), Tanaka et al.
patent: 5875274 (1999-02-01), Stein
Hurwitz et al., "Integrated GaAs--AIGaAs double-heterostructure lasers", (1975) Applied Physics Letters, 27(4):241-243.
Kawanishi et al., "Chemically Assisted Ion Beam Etching of GaAs/AIGaAs Using Chlorine Ions", (1996) JPN. J. Phys. 35:L880-L882.
Nakano et al., "Absorptive-Grating Gain-Coupled Distributing-Feedback MQW Lasers with Low Threshold Current and High Single-Longitudinal-Mode Yield", (1993) JPN J. Appl. Phys 32:825-829.
Williams et al., "High Performance Buried Ridge DFB Lasers Monolithically Integrated With Butt Coupled Strip Loaded Passive Waveguides for OEIC", (1990) Electronics Letters 26(2):142-143.

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