Optical waveguides – Planar optical waveguide – Thin film optical waveguide
Patent
1992-10-09
1994-03-29
Bovernick, Rodney B.
Optical waveguides
Planar optical waveguide
Thin film optical waveguide
385 49, 385129, 65 31, G02B 610
Patent
active
052992764
ABSTRACT:
A method for fabricating a waveguide type optical device is disclosed, through which a core and a reference plane are obtained at the same time by etching a core layer using a thin layer of a predetermined shape formed on the core layer as a mask. In this waveguide type optical device, the core is easily coupled with an optical element such as an optical fiber by means of the reference plane.
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patent: 4712855 (1987-12-01), Tolksdorf et al.
patent: 4812005 (1989-03-01), Heywang
patent: 4812153 (1989-03-01), Andrejco et al.
patent: 4966433 (1990-10-01), Blonder
patent: 5109464 (1992-04-01), Munowitz et al.
patent: 5179614 (1993-01-01), Kanamori et al.
Arima Tadao
Okamura Koji
Bovernick Rodney B.
Fujitsu Limited
Heartney Phan Thi
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