Waveguide type optical control element and process for its...

Optical waveguides – With optical coupler – Particular coupling structure

Reexamination Certificate

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C385S039000, C385S041000

Reexamination Certificate

active

07418173

ABSTRACT:
A waveguide type optical control element which has an optical waveguide made of an insulating material having an electro-optic effect or a thermo-optic effect, and a control electrode provided in contact with or proximity to the optical waveguide; the optical waveguide having a propagation loss which is 1 dB/cm or less at wavelengths of from 1.3 μm to 1.6 μm. The control electrode is constituted of a conductive oxide film having a carrier electron concentration of 5.5×1020/cm3or less and a resistivity of 9.5×10−4Ωcm or less, and the conductive oxide film has a coefficient of extinction of light waves, of 0.240 or less at a wavelength of 1.55 μm.

REFERENCES:
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patent: 1 416 541 (2004-05-01), None
patent: 2004-287281 (2004-10-01), None
“Techniques of Transparent Conductive Films;”Ohmusha, Ltd., Edited by Japan Society for the Promotion of Science; pp. 54-57, three cover sheets and one end sheet (6 Sheets total.)/Discussed in the specification.
C.M. Gee, et al.; “Minimizing dc drift in LiNbO3waveguide devices;”Appl. Phys. Lett.; vol. 47; No. 3; Aug. 1, 1985; pp. 211-213.
I. Safi, et al.; “The properties of reactively-sputtered, stoichiometry-controlled and optimum-conductivity transparent indium oxide films as a function of their titanium, aluminum and zinc content; comparisons with the use of tin as a dopant;”Thin Solid Films; vol. 343-344; 1999; pp. 115-118.
G. Campet, et al.; “The electronic effect of Ti4+, Zr4+and Ge4+dopings upon the physical properties of In2O3and Sn-doped In2O3ceramics: application to new highly-transparent conductive electrodes;”Materials Science and Engineering B; vol. 19; No. 3; 1993; pp. 285-289.

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