Optical waveguides – Integrated optical circuit
Patent
1996-09-20
2000-06-20
Lee, John D.
Optical waveguides
Integrated optical circuit
385132, 257435, 257461, G02B 612
Patent
active
060787074
ABSTRACT:
A waveguide-photodetector includes a semiconductor substrate; a waveguide section, provided on the semiconductor substrate, for propagating light; an opto-electric converting section, provided in the semiconductor substrate, for converting the light into an electric signal; and an insulative layer provided between the semiconductor substrate and the waveguide section. The waveguide section includes at least an introducing part for introducing the light to the waveguide section, a coupling part for coupling the light introduced to the waveguide section to the opto-electric converting section, and a propagating part for propagating the light from the introducing part to the coupling part. The insulative layer includes a first region for defining a position and a shape of an impurity diffused region of the opto-electric converting section, a second region which encloses the first region and is thicker than the first region, and a step portion between the first region and the second region. The introducing part, the propagating part and the coupling part of the waveguide section are located on the first region.
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N. Yamaguchi et al., Journal of Lightwave Technology, vol. 8, No. 4, pp. 587-593, 1990 "Low-Loss Spot-Size Transformer by Dual Tapered Waveguides (DTW-SST)", Apr. 1990.
Kurata Yukio
Yamamoto Hiroyuki
Yamamoto Motohiko
Yoshida Yoshio
Conlin David G.
Daley, Jr. William J.
Lee John D.
Sharp Kabushiki Kaisha
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