Wavefront measuring system with integral geometric reference (IG

Details Wavefront measuring system with integral geometric reference (IG Wavefront measuring system with integral geometric reference (IG

1995-12-15

1997-05-13

Pham, Hoa Q.

Optics: measuring and testing

Lamp beam direction or pattern

2502019, G01J 120

Patent

active

056297653

ABSTRACT:
A geometric sensor includes a Monolithic Lenslet Module (MLM) subaperture array having a plurality of microlenses, each of which have an opaque center formed concentric with the microlens optical axis, at the location of the lens chief ray, to produce an integral geometric reference (IGR) spot pattern of the lens array which is used to correct for sensor errors to an accuracy comparable with that achieved with reference plane wave calibration.

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