Wave plate and optical device using the same

Details Wave plate and optical device using the same Wave plate and optical device using the same

2006-05-16

2006-05-16

Assaf, Fayez G. (Department: 2872)

Optical: systems and elements

Diffraction

From grating

C359S558000, C359S574000, C359S350000, C359S360000, C359S485050

Reexamination Certificate

active

07046444

ABSTRACT:
The present invention provides a wave plate capable of obtaining preferable phase conversion characteristic over a wide wavelength range. The wave plate includes an aluminum oxide film having linear grating groove patterns. The period L (μm) and the duty ratio De of the grating groove patterns are set at values within the first range specified by the following four formulas:in-line-formulae description="In-line Formulae" end="lead"?L≦0.65in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?L≧2×10−14e31.263Dein-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?L≦6.0317De2−10.352De+5.0516in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?(De−0.85)2/0.442+(L−0.41)2/0.392≦1in-line-formulae description="In-line Formulae" end="tail"?

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patent: 2004/0120041 (2004-06-01), Silverstein et al.
Hambach, D., “Efficient High-Order Diffraction of Extreme-Ultraviolet Light and Soft X-Rays by Nanostructured Volume Gratings”, Optic Letters, vol. 26, No. 15, Aug. 1, 2001, pp. 1200-1202.
Masuda, H. et al., “Highly Ordered Nanochannel-Array Architecture in Anodic Alumina”, Appl. Phys. Letters, vol. 71 (19), Nov. 10, 1997, pp. 2770-2772.

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