Wave front aberration measuring apparatus having means for adjus

Details Wave front aberration measuring apparatus having means for adjus Wave front aberration measuring apparatus having means for adjus

1992-07-28

1994-05-31

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

369 4423, G01J 120

Patent

active

053171446

ABSTRACT:
An apparatus for measuring a wave front aberration includes a light beam splitter for dividing a parallel laser light beam made incident from a measuring object into two beamfluxes, an image rotator disposed in at least one optical path of the divided beam fluxes for rotating the wave front on the optical axis, an interference device for interfering after superposing the beam fluxes whose wave fronts are rotated relatively, an imaging lens for forming the interfered beam into an image, and an observation device for observing the imaged interference fringes.

REFERENCES:
patent: 4355871 (1982-10-01), Nevyas et al.
patent: 4379633 (1983-04-01), Bickel et al.
patent: 4555229 (1985-11-01), Wakamiya
patent: 4639586 (1987-01-01), Fender et al.
patent: 4660978 (1987-04-01), Wu
patent: 4682025 (1987-07-01), Livingston et al.
patent: 4822151 (1989-04-01), Tatsuno et al.
patent: 5055663 (1991-10-01), Morimoto et al.

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