Water soluble photosensitive polymide polymer, its...

Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Compositions to be polymerized by wave energy wherein said...

Reexamination Certificate

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Details

C525S434000, C528S026000, C562S453000

Reexamination Certificate

active

08084512

ABSTRACT:
The present invention relates to a water soluble photosensitive polyimide polymer, preparation thereof and a photoresist composition containing the same. The water soluble photosensitive polyimide polymer is characterized by having repeat units represented by the following formula (I):the other symbols are defined in the specification].

REFERENCES:
patent: 5587275 (1996-12-01), Kato
patent: 6025113 (2000-02-01), Kikkawa et al.

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