Water soluble contrast enhancement composition and method of use

Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...

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Details

430193, 430311, 430326, G03C 154, G03C 160, G03F 7022, G03F 7023

Patent

active

051733900

ABSTRACT:
A water soluble contrast enhancement compound and composition, and a method of use thereof, are disclosed for improving sidewall profiles in photoresist patterning and developing. The compound consists of a 1-oxy-2-diazonaphthalene sulfonamide salt.

REFERENCES:
patent: 3269837 (1966-09-01), Sus
patent: 3890152 (1975-06-01), Ruckert
patent: 3965278 (1976-06-01), Duinker
patent: 4672021 (1987-06-01), Blumel
patent: 4997742 (1991-03-01), Covington

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