Water removal apparatus and inspection apparatus including same

Details Water removal apparatus and inspection apparatus including same Water removal apparatus and inspection apparatus including same

2006-07-18

2010-10-26

Ali, Mohammad M (Department: 3744)

Refrigeration

Disparate apparatus utilized as heat source or absorber

C062S475000

Reexamination Certificate

active

07818972

ABSTRACT:
A water removal apparatus removes water contained in a coolant circulating between a target object and a cooling system through a circulation line. The water removal apparatus includes a bypass line through which a part of the coolant separated from the circulation line flows; a heat exchanger, provided in the bypass line, for heating the coolant flowing along the bypass line by using a waste heat of the cooling system; and a water adsorption material, provided at a downstream side of the heat exchanger, for adsorbing the water contained in the coolant. Further, an inspection apparatus, for performing an inspection for a semiconductor wafer mounted on the target object while controlling a temperature of the semiconductor wafer on the target object, includes the water removal apparatus.

REFERENCES:
patent: 3779036 (1973-12-01), Girardin
patent: 5301520 (1994-04-01), Kitamura et al.
patent: 5333471 (1994-08-01), Yamada
patent: 6807820 (2004-10-01), Aikawa et al.

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