Water free furnace tube with self-heating quartz plug

Details Water free furnace tube with self-heating quartz plug Water free furnace tube with self-heating quartz plug

1999-05-12

2000-10-17

Jeffery, John A.

Electric resistance heating devices

Heating devices

Radiant heater

219390, 118724, 432250, H01L 21205

Patent

active

061343854

ABSTRACT:
A furnace tube with quartz plug is configured to have an oxidation performed therein, and at least one elongated protruding portion with an opening on one side of the tube. The furnace also includes a quartz plug with a portion thereof inserted inside the elongated protruding portion, and with another portion thereof inserted into the tube. Accordingly, water resided in a gap between inner surface of the elongated protruding portion and outer surface of the quartz plug can be evaporated by self-heating of the quartz plug.

REFERENCES:
patent: 3800716 (1974-04-01), Berger
patent: 4020791 (1977-05-01), Reuschel et al.
patent: 4312294 (1982-01-01), Satoh
patent: 4796543 (1989-01-01), Barkley
patent: 5259883 (1993-11-01), Yamabe et al.
patent: 5584934 (1996-12-01), Lin
patent: 5828036 (1998-10-01), Hsue et al.

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